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Well-controlled method of Si nanopattern definition -pattern definition by edge oxidation have been presented. The technique is suitable for fabrication of narrow paths of width ranged from several tens of nm to several ľm by means of photolithography equipment working with ľm-scale design rules. Process details influencing a shape of the Si pattern have been discussed. SEM examinations have been presented.doi:10.12693/aphyspola.116.s-139 fatcat:nitdgt25kvh3fjshljkqyrusom