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The Effect of RF-Plasma Power on the Growth of III-Nitride Materials
2019
Eurasian Journal of Science and Engineering
In this study, n-InGaN nanorods were grown directly on p-type Si (111) substrates by plasmaassisted molecular beam epitaxy (PA-MBE). The crystal structure is investigated using the reflection of high-energy electron diffraction patterns. Additionally, the morphology and optical properties of the InGaN nanorods were investigated using both scanning electron microscopy and room temperature photoluminescence spectra. The results showed that, the PL peak position shifted toward lower energy by
doi:10.23918/eajse.v4i3sip66
fatcat:pwexn2of7ra43jueggd7m75f4e