Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope

Chern-Sheng Lin, Shu-Hsien Fu, Mau-Shiun Yeh, Chingfu Tsou, Teng-Hsien Lai
2012 Indian Journal of Pure & Applied Physics   unpublished
An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and
more » ... novated contour line algorithm is used to build up micro-structure 3D profile. In the experiments, the total processing time for five parts of element could be reduced to less than 5 s and the system error is less than 0.02 m.