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Membranes of nanoporous aluminum oxide (alumina) have been obtained using the electrochemical etching technique by varying technological regimes. They were investigated by the Rutherford backscattering technique. The obtained spectra revealed distribution of elements over the entire thickness of the layer. It has been shown that almost all ions, which fly in the beam, fall into the channel -por Al 2 O 3 . This leads to a focusing of the charged particles beam.doi:10.1088/1742-6596/929/1/012052 fatcat:hga32vonv5hithwdzqesllneya