CMP's pumping characteristics for various gases
種々の気体に対する複合分子ポンプの排気特性

Masashi IGUCHI, Shigeru KANETO, Shoichi HASHIMOTO, Takayuki HARAGUCHI, Takashi MARUYAMA, Hisashi OIKAWA, Tatsuji IKEGAMI
1985 Shinku  
doi:10.3131/jvsj.28.251 fatcat:4vd6qbso5bgipjdkzspgofxohe