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シリコン完全結晶のエピタキシャル成長(<特集>Growth and Characterization of Silicon Crystals)
Epitaxial Growth of Silicon Perfect Crystals(Growth and Characterization of Silicon Crystals)

Jun-ichi Nishizawa, Masafumi Shimbo
1977 Journal of the Japanese Association for Crystal Growth  

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doi:10.19009/jjacg.4.1-2_23 fatcat:bbksfh35rbhkzmw4hgxvuer2eq
lang:ja
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Jun-ichi Nishizawa, Masafumi Shimbo. "シリコン完全結晶のエピタキシャル成長(<特集>Growth and Characterization of Silicon Crystals)." Journal of the Japanese Association for Crystal Growth 4.1-2 (1977) 23-39