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Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: simulation and experiment
2009
Journal of Physics D: Applied Physics
We simulated and measured near-field distributions of molecules impinging on a flat substrate from tube-based nozzles with varying exit aperture geometries (straight, bevelled and doubly perforated). Simulations were performed with the test-particle Monte Carlo approach taking into account the Knudsen number (molecular/transient flow) at the nozzle exit. Distributions were measured via thermal decomposition of Co 2 (CO) 8 molecules on a homogeneously heated substrate. For all geometries and
doi:10.1088/0022-3727/42/12/125305
fatcat:4e5jj2ze25holiugpk6c7adzbe