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Resonant controller for fast atomic force microscopy
2012
2012 IEEE 51st IEEE Conference on Decision and Control (CDC)
The imaging performance of the atomic force microscope (AFM) in higher scanning speed is limited to the one percent of the first resonant frequency of it's scanning unit i.e., piezoelectric tube scanner (PTS). In order to speed up the functioning of the AFM for high speed imaging, a resonant controller with an integral action has been applied in the both x and y axis of the PTS for damping the resonant mode of the scanner and improve the tracking performance. The overall closed-loop system with
doi:10.1109/cdc.2012.6426563
dblp:conf/cdc/DasPP12
fatcat:gppz6txqm5h3xhw7y3ih2uponu