Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates

A Alamgir, A Bogatov, M Yashin, V Podgursky
2019 Proceedings of the Estonian Academy of Sciences  
The study investigates mechanical and tribological properties of alumina (Al 2 O 3 ) films prepared on Si(100) substrates. The 100-nm thick films were deposited by atomic layer deposition. Nanoindentation and nano-scratch tests were performed with Berkovich and sphero-conical diamond indenters, respectively. Energy-dispersive X-ray spectroscopy and optical and scanning electron microscopy were used to analyse the surface morphology and chemical composition of the thin films. X-ray diffraction
more » ... X-ray diffraction was used to characterize their crystal structure. Crystallization was found to start at 1100 °C after 3 hours of annealing. The hardness and tribological properties of the alumina films were influenced by the substrate in nanoindentation and nano-scratch tests. Within the relatively low load range (5-50 mN), the coefficient of friction of Si and alumina against diamond depended on the load, most likely due to a change in the elastic/plastic deformation behaviour within the Si substrate. This study focuses on mechanical and tribological properties (within 0.2-400 mN of load) of 100-nm thick alumina films deposited on Si(100).
doi:10.3176/proc.2019.2.01 fatcat:rwflwbzfgrbn7ogd7675uxeesm