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Defectivity Study for Directed Self-Assembly (DSA) Contact Hole Shrink

Tsung-Han Ko, Kuan-Hsin Lo, Chieh-Han Wu, Ching-Yu Chang, Chung-Ju Lee, John Lin
2016 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  

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doi:10.2494/photopolymer.29.793 fatcat:l43z4n6mwjeuroqzyfptlsvh7u
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Tsung-Han Ko, Kuan-Hsin Lo, Chieh-Han Wu, Ching-Yu Chang, Chung-Ju Lee, John Lin. "Defectivity Study for Directed Self-Assembly (DSA) Contact Hole Shrink." Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi) 29.6 (2016) 793-796