Two step process for the fabrication of diffraction limited concave microlens arrays

Patrick Ruffieux, Toralf Scharf, Irène Philipoussis, Hans Peter Herzig, Reinhard Voelkel, Kenneth J. Weible
2008 Optics Express  
A two step process has been developed for the fabrication of diffraction limited concave microlens arrays. The process is based on the photoresist filling of melted holes obtained by a preliminary photolithography step. The quality of these microlenses has been tested in a Mach-Zehnder interferometer. The method allows the fabrication of concave microlens arrays with diffraction limited optical performance. Concave microlenses with diameters ranging between 30 µm to 230 µm and numerical
more » ... d numerical apertures up to 0.25 have been demonstrated. As an example, we present the realization of diffusers obtained with random sizes and locations of concave shapes.
doi:10.1364/oe.16.019541 pmid:19030040 fatcat:ytk34ep4ljfezbq4ucvimpqyve