Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Shinan Qian
2011 International Journal of Optics  
Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of∼1 μrad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface
more » ... ers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.
doi:10.1155/2011/902158 fatcat:imonzj3pmzd4vb47hp3xzcgwri