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Micromachined III V cantilevers for AFM-tracking scanning Hall probe microscopy

A J Brook, S J Bending, J Pinto, A Oral, D Ritchie, H Beere, A Springthorpe, M Henini
2002 Journal of Micromechanics and Microengineering  

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doi:10.1088/0960-1317/13/1/317 fatcat:rlvmeo4yprejrf4zguwfcfbnxa
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A J Brook, S J Bending, J Pinto, A Oral, D Ritchie, H Beere, A Springthorpe, M Henini. "Micromachined III V cantilevers for AFM-tracking scanning Hall probe microscopy." Journal of Micromechanics and Microengineering 13.1 (2002) 124-128