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Effect of bias voltage and nitrogen content on the morphological, structural, mechanical, and corrosion resistance properties of micro-alloyed Ti1−xAl0.8xP0.2XNy films deposited by high power impulse magnetron sputtering
2023
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
The applications of multicomponent coatings (such as doped ternary or quaternary coatings) with superior functional properties have been shown to efficiently and sustainably improve the life span of engineering materials. This study reports the synergistic effect of negative substrate bias voltages Us and reactive gas QN2 ratio on the properties of phosphorous (P) microalloyed Ti1−xAl0.8xP0.2xN multicomponent coatings deposited using high power impulse magnetron sputtering. It is found that an
doi:10.1116/6.0002232
fatcat:l5ry4jddrnbvhd43xdaq7wberi