Synthesis of TiO2 thin films by the SILAR method and study of the influence of annealing on its structural, morphological and optical properties
Ingeniare : Revista Chilena de Ingeniería
Síntesis de películas delgadas de TiO 2 por el método SILAR y estudio de la influencia del recocido en las propiedades estructurales, morfológicas y ópticas ABSTRACT Preparation and characterization of TiO 2 films were made. Films were synthesized on glass substrates by the SILAR (Successive Ionic Layer Adsorption and Reaction) method. The preparation consisted of 150 cycles of a successive and alternate immersion of substrates in the precursor solution and in distilled water at 353 K. Growing
... at 353 K. Growing was conducted at two conditions of the precursor solution which contained TiCl 3 and NH 2 CONH 2 : at room temperature and at 343 K. After the growth, films were annealed at 723 K for 2 hours. Regarding characterization, samples were studied using XRD, SEM and UV-Vis. Structural characterization results showed that, in general, the films presented an amorphous crystalline structure except those which were grown with precursor solution at 343 K and thermally treated after the growths, which presented an anatase crystalline structure. Concerning their morphology, a granular structure and a random distribution of a flower-like structure were observed. Grain sizes did not change significantly after annealing. The optical study was carried out taking into account an indirect transition allowed determining the band gap energy to be around 3.1 eV. This value, which is typical for TiO 2 , decreases after annealing, usual for this type of films.