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Thin film Ag superlens towards lab-on-a-chip integration
2009
Optics Express
Preserved Fulltext
A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space
doi:10.1364/oe.17.022543
pmid:20052179
fatcat:zf2vjb2w3barrdzwiuqodgrj4y