A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2020; you can also visit the original URL.
The file type is application/pdf.
Data on MOS Hall Bars 1410-1413
[report]
2015
unpublished
Preserved Fulltext
Purpose of this set This set (1410 -1413) are Al/reactive/AlO/Si Hall bars built on no-poly Si wafers using the same process flow as for SiGe devices. The purpose is to see whether the process flow has any problem without complications from possible material issues of SiGe.
doi:10.2172/1171940
fatcat:d74emrpxu5hkvoxfwob3ahs2ei