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The reaction of Zn(CH 3 ) 2 and activated H 2 O produced in a reaction of H 2 and O 2 on a Pt catalyst and effused from a nozzle was examined both experimentally and theoretically. This reaction has been shown to be effective in the preparation of high-quality ZnO films. Laser-induced fluorescence measurements showed that radical species, such as H atoms and OH radicals, do not play major roles. The rotational temperature of H 2 O, measured with a coherent anti-Stokes Raman scatteringdoi:10.7567/jjap.52.096701 fatcat:ivdjr5ij4vhxjbe6wu3bbypubq