A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2019; you can also visit the original URL.
The file type is application/pdf.
A Modified FNN Fault Diagnosis on PCVD Microwave System
2015
Advances in Fuzzy Systems
Preserved Fulltext
A modified FNN fault diagnosis algorithm is presented in this paper for microwave subsystem of Plasma Chemical Vapor Deposition (PCVD). The symptom variables are selected as the crisp inputs, and the corresponding membership functions are obtained from premeasured data as well as experts' diagnostic experience/knowledge. The prior probability and the restriction coefficients are combined into the FNN algorithm via matrix operator. This modified FNN algorithm is verified for PCVD fault diagnosis
doi:10.1155/2015/632456
fatcat:df6ltbh2hvg7tcluhih4xrdry4