CMP Fill Synthesis [chapter]

Andrew Kahng, Kambiz Samadi
2008 Handbook of Algorithms for Physical Design Automation  
We survey recent research and practice in the area of chemical-mechanical polishing (CMP) fill synthesis, in terms of both problem formulations and solution approaches. We review the CMP as the planarization technique of choice for multilevel very large-scale integration metallization processes. Post-CMP wafer topography varies according to pattern density. We review density-analysis methods and density-control objectives that are used in today's fill-synthesis algorithms. In addition, we
more » ... addition, we discuss the concept of design-driven fill synthesis that seeks to optimize CMP fill with respect to objectives beyond mere density uniformity. Design-driven fill synthesis minimizes the impact of CMP fill on design performance and parametric yield while still satisfying the density criteria that are motivated by manufacturing models. We conclude with a discussion of where CMP fill synthesis may be naturally integrated within future design and manufacturing flows. Index Terms-Chemical-mechanical polishing (CMP), CMP fill, design-driven fill, topography.
doi:10.1201/9781420013481.ch36 fatcat:5u2ufr4ulrfybau7lhky3i7u6q