Suppressed grain-boundary scattering in atomic layer deposited Nb:TiO2 thin films

Janne-Petteri Niemelä, Yasushi Hirose, Kei Shigematsu, Masahito Sano, Tetsuya Hasegawa, Maarit Karppinen
2015 Applied Physics Letters  
Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition J. Vac. Sci. Technol. A 30, 021202 (2012); 10.1116/1.3687939 rf magnetron sputter deposition of transparent conducting Nb-doped Ti O 2 films on Sr Ti O 3
doi:10.1063/1.4935425 fatcat:ycuuokor2fdttplwwgrmhil64e