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Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition J. Vac. Sci. Technol. A 30, 021202 (2012); 10.1116/1.3687939 rf magnetron sputter deposition of transparent conducting Nb-doped Ti O 2 films on Sr Ti O 3doi:10.1063/1.4935425 fatcat:ycuuokor2fdttplwwgrmhil64e