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Tribology of Diamond-Like Carbon Films
The availability of reliable characterisation tools for carbon films down to a few atomic layers' thickness is one of the most decisive factors for technology development and production. In particular, non-destructive techniques are preferred. This chapter reviews the use of x-ray reflectivity, surface acoustic waves, and Raman spectroscopy to characterise carbon films in terms of density, thickness, layering, elastic constants, roughness, structure, and chemical composition. Ramandoi:10.1007/978-0-387-49891-1_2 fatcat:hkkdfzvnuffhbp2mlrob5t47gy