Improved MEMS-in-TEM setup for high sensitivity thermal characterization of nanowire using a new TEM cryo-holder

L. Jalabert, G. Valet, A. Chorosz, D. Guo, R. Kometani, H. Guillou, T. Sato, S. Volz, H. Fujita
2013 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)  
Thermal conductivity of diamond-like-carbon nanowire is investigated by combining MEMS in TEM (transmission electron microscope) with a new cryogenic TEM holder allowing in-situ electrical measurements from 90K to 380K. A suspended DLC nanowire of 80nm in diameter and 10mic in length was locally grown by FIB-CVD in between an integrated micro-heater and a temperature sensor. Combined with a special Wheastone bridge configuration, we show drastic improvement of temperature detection on the
more » ... and estimate the thermal conductance of the DLC nanowire at low temperature in-situ in TEM.
doi:10.1109/transducers.2013.6627148 fatcat:ewlrpsmbrrgcfagx63s7llae2i