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Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs

J. Christopher, M.E. Kuhl, K. Hirschman
2005 ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005.  

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A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction will have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine
more » ... hing rules as well as their interaction are shown to have a significant impact. 0-7803-9144-6/05/$20.00 ©2005 IEEE.
doi:10.1109/issm.2005.1513302 fatcat:2zl53raxwvcw7powb54s4td6ge
Citation

J. Christopher, M.E. Kuhl, K. Hirschman. "Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs." ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. (2005)