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Electron-beam-induced deposition (EBID) is a promising technique to fabricate small-sized structures on substrates and is expected to be applied in technology . Compact structures are usually fabricated with this technique. Recently, nanometer-sized W-dendritic and other branched structures were fabricated on insulator substrates with EBID in a 200 kV transmission electron microscope (TEM) . However, one problem is that the nanodendrite usually contains amorphous. It is desirable todoi:10.1017/s1431927605503179 fatcat:uqfgw7cyobc3tkxubergl4oyoe