Synonyms Electrostatic RF MEMS switches; Micromechanical switches; RF MEMS switches Definition Capacitive micro-electro-mechanical systems (MEMS) switches are a special type of micromachined switches that control radio frequency (RF) signal paths in microwave and millimeter-wave circuits through mechanical motion and contact. Overview Capacitive and direct current (dc)-contact MEMS switches are among the most important micromachined devices for high-frequency applications due to their

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... RF performance. Dc-contact switches function similarly to conventional relays: micromachined beams or plates move under the influence of an appropriately applied force (e.g., electrostatic force) to open or close a metal-to-metal contact. While micromachined beams or plates are also utilized in capacitive switches, these switches rely on metal-to-dielectric contacts to implement their on and off states. Capacitive switches are particularly attractive for demanding high-frequency communications, electronic warfare, and radar systems due to their ultralow loss (<0.1-0.2 dB up to 40 GHz), high isolation (>20-50 dB for frequencies beyond 10 GHz), very high linearity (>66 dBm third-order intercept point), and nearzero power consumption ($tens of nJ per