Effect of Thickness and Doping Concentration of Aluminium to the Fabrication of ZnO Photoconductive Sensor
Journal of Physics, Conference Series
The effect of thickness of aluminium doped zinc oxide (AZO), doping concentration of Aluminium as well as the annealing temperature to the fabrication of AZO photoconductor sensor is the main focused of this research. Silvaco TCAD tool is used to fabricate the AZO photoconductor sensor and to obtain the electrical characteristics of the device by using its simulation software. The device performance was investigated with various thicknesses of AZO film, annealing temperatures and different Al
... and different Al doping concentration. The Al doping was varied 1x10 17 cm -3 , 1x10 19 cm -3 and 1x10 21 cm -3 , the thickness was varied 0.2 nm, 1.0 nm and 1.2 nm and the temperature was varied from 300°C, 500°C and 700°C. The electrical properties of AZO photodetector were characterized using current voltage (I-V) measurement system respectively. The result shows that by changing the thicknesses of aluminium doped zinc oxide (AZO), and the doping concentration of aluminium in the zinc oxide have greatly improved the electrical characteristics as well as the electrical performances of the photoconductor sensor. Indeed, the post fabrication and simulation process using simulation tools is helpful for the determination of the parameters during the later process of the real device fabrication.