Micro Patterning Using Active Polymer Pen Array
능동 폴리머 펜 어래이를 이용한 미세 패터닝

Yoonsoo Han, Jihwa Hong
2013 Journal of the Korean Institute of Electrical and Electronic Material Engineers  
We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest
more » ... array fabricated is 4×4 with a spacing of 250 μm in both x and y axes.
doi:10.4313/jkem.2013.26.12.853 fatcat:4upgswuvzre65in7jgllau3aju