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A summary of the current development of developing technology in the field of integrated circuit manufacturing
2015
Proceedings of the 3rd International Conference on Mechatronics, Robotics and Automation
unpublished
Preserved Fulltext
Developing technology is critical for the lithography technology in the field of integrated circuit (IC). The developing nozzle and process are the "hard" and "soft" technology, respectively. It is the continuous improvement and innovation of developing nozzle and process that drive the rapid development of lithography technology and IC technology, and promote the reform of information technology. In this paper, we emphatically introduce the development status of developing nozzle and process,
doi:10.2991/icmra-15.2015.256
fatcat:qc3to5ul45dzdlir2azlvjvj2a