A summary of the current development of developing technology in the field of integrated circuit manufacturing

Xue-Ping Liu, Qiang Xu, Feng Ning, Han Wang
2015 Proceedings of the 3rd International Conference on Mechatronics, Robotics and Automation   unpublished
Developing technology is critical for the lithography technology in the field of integrated circuit (IC). The developing nozzle and process are the "hard" and "soft" technology, respectively. It is the continuous improvement and innovation of developing nozzle and process that drive the rapid development of lithography technology and IC technology, and promote the reform of information technology. In this paper, we emphatically introduce the development status of developing nozzle and process,
more » ... nd put forward the development trend of developing technology based on the current situation of IC technology in China.
doi:10.2991/icmra-15.2015.256 fatcat:qc3to5ul45dzdlir2azlvjvj2a