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High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
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unpublished
Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing
doi:10.1021/acsanm.7b00342.s004
fatcat:ktahgl7uqzf4lcnou3hn3k2e3m