Conducting polymers in microelectronics

M. Angelopoulos
2001 IBM Journal of Research and Development  
Conjugated polymers in the nondoped and doped conducting state have an array of potential applications in the microelectronics industry. Conducting polymers are effective discharge layers as well as conducting resists in electron beam lithography, find applications in metallization (electrolytic and electroless) of plated through-holes for printed circuit board technology, provide excellent electrostatic discharge protection for packages and housings of electronic equipment, provide excellent
more » ... provide excellent corrosion protection for metals, and may have applications in electromagnetic interference shielding. This paper reviews some of these applications and briefly describes possible future applications of conducting polymers for use as interconnections or for electronic devices.
doi:10.1147/rd.451.0057 fatcat:u2ievl6nzbdhzbhe5ewjpka6se