Internet Archive Scholar

Fabrication of Passive Thin Film Capacitor by Using Semiconductor Technology

Ichiro KOIWA, Kinya ASHIKAGA, Makoto TERUI, Yasushi SHIRAISHI, Noritaka ANZAI, Takashi OHSUMI, Tetsuya OSAKA, Tomoya KUMAGAI, Yoshimi SATO, Akira HASHIMOTO
2005 Journal of The Japan Institute of Electronics Packaging  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (4.5 MB)
https://web.archive.org/web/20181031224439/https://www.jstage.jst.go.jp/article/jiep1998/8/6/8_6_517/_pdf

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL. The file type is application/pdf.

doi:10.5104/jiep.8.517 fatcat:4njxfisjofdydc65dxrownjfy4
Citation

Ichiro KOIWA, Kinya ASHIKAGA, Makoto TERUI, Yasushi SHIRAISHI, Noritaka ANZAI, Takashi OHSUMI, Tetsuya OSAKA, Tomoya KUMAGAI, Yoshimi SATO, Akira HASHIMOTO. "Fabrication of Passive Thin Film Capacitor by Using Semiconductor Technology." Journal of The Japan Institute of Electronics Packaging 8.6 (2005) 517-522