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EUV MET printing and actinic imaging analysis on the effects of phase defects on wafer CDs

Hakseung Han, Kenneth A. Goldberg, Anton Barty, Eric M. Gullikson, Yoshiaki Ikuta, Toshiyuki Uno, Obert R. Wood, Stefan Wurm, Michael J. Lercel
2007 Emerging Lithographic Technologies XI  

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doi:10.1117/12.711166 fatcat:ebb2afnhw5gpbkve2n2vjjolwu
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Hakseung Han, Kenneth A. Goldberg, Anton Barty, Eric M. Gullikson, Yoshiaki Ikuta, Toshiyuki Uno, Obert R. Wood, Stefan Wurm, Michael J. Lercel. "EUV MET printing and actinic imaging analysis on the effects of phase defects on wafer CDs." Emerging Lithographic Technologies XI (2007)