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Effect of inclined target at the end of plasma on plasma parameter
25a-C-1 シートプラズマ終端部における傾斜ターゲットのプラズマパラメータに及ぼす影響

Masataka ONO, Akira TONEGAWA, Sigeyasu SAKAMOTO, Kazutaka KAWAMURA, Kazuo TAKAYAMA, Tsuguhiro WATANABE, Nobuyoshi OHYABU, Hajime SUZUKI
1998 Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu)  

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doi:10.11316/jpsgaiyo.53.2.4.0_926_2 fatcat:d525jygje5ds5pbmaiiqd3o3ni
lang:ja
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Masataka ONO, Akira TONEGAWA, Sigeyasu SAKAMOTO, Kazutaka KAWAMURA, Kazuo TAKAYAMA, Tsuguhiro WATANABE, Nobuyoshi OHYABU, Hajime SUZUKI. "Effect of inclined target at the end of plasma on plasma parameter." Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu) 53.2.4.0 (1998) 926