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The CVD-grown graphene as a middle layer was introduced between Pt cylinders and SiO2/Si to extend the application of graphene for improving the wear performance of microelectromechanical systems. Periodic arrays of Pt cylinders were prepared on the graphene/SiO2/Si (Pt/graphene) and SiO2/Si substrate (Pt/SiO2) using the magnetron sputtering technique. To characterize Pt/graphene and Pt/SiO2, nanoindentation and macrotribological tests were performed. The results showed that the frictiondoi:10.1155/2015/947947 fatcat:ehcj2hevrzelzeoltvvm2ovtgu