Ferroelectric vs. structural properties of large-distance sputtered epitaxial LSMO/PZT heterostructures

Philipp M. Leufke, Robert Kruk, Di Wang, Christian Kübel, Horst Hahn
2012 AIP Advances  
We report on large-distance rf-magnetron sputtering as a competitive alternative to pulsed laser deposition and off-axis sputtering for the growth of epitaxial PbZr 0.52 Ti 0.48 O 3 (PZT) thin films. To determine the characteristics of the PZT films, the studies were focused on the interplay between microstructural and ferroelectric properties. The films were deposited on insulating or conducting (Nb-doped) SrTiO 3 and MgO substrates with La 0.83 Sr 0.17 MnO 3 as bottom electrode. The
more » ... rode. The uniformity and homogeneity of the samples was demonstrated by using large area (1.0 mm 2 ) top electrodes. It is shown that epitaxial heterostructures of excellent crystalline and ferroelectric quality can be deposited from a stoichiometric PZT target without the need for excess PbO in the target or post-annealing of the samples. Copyright 2012 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [http://dx.
doi:10.1063/1.4756997 fatcat:6wdabk2btje3baamtw2wyzrqpe