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ESD testing and combdrive snap-in in a MEMS tunable grating under shock and vibration
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
This work describes a method for tracking the dynamics of electrostatic discharge (ESD) sensitive MEMS structures during ESD events, as well as a model for determining the reduced combdrive snap-in voltage under vibration and shock. We describe our ESD test setup, based on the human body model, and optimized for high impedance devices. A brief description of the MEMS tunable grating, the test structure used here, and its operation is followed by results of the measured complex device dynamicsdoi:10.1117/12.873253 fatcat:snhcf4t4xvhknnglz42mtzlv6i