Supplementary document for High accuracy cross-sectional shape analysis by coherent soft X-ray diffraction - 4790761.pdf

Tetsuya Hoshino, Masahiko Shiono, Saswatee Banerjee, Sadao Aoki, Kenji Sakurai, Masahide Itoh
2020 figshare.com  
Supplements 1, 2 and 3
doi:10.6084/m9.figshare.12869639.v1 fatcat:w7bf2o543bgmnbyp2ugasgfvia