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A technique for the localised synthesis, self-assembly and direct integration of nanostructures with microstructures employing the localised synthesis of nanostructures onto Microelectromechanical Systems (MEMS) structures is demonstrated. The in-situ guided growth process of the nanostructures is accomplished using a locally applied electric-field realised by using the MEMS structures as electrodes. The self-assembly and self-terminated contact process of nanostructures is achieved when thedoi:10.1504/ijmpt.2009.022405 fatcat:llyw26ptyjfahlsyngm3sxtyc4