A technique for the localised synthesis, self-assembly and direct integration of nanostructures with microstructures employing the localised synthesis of nanostructures onto Microelectromechanical Systems (MEMS) structures is demonstrated. The in-situ guided growth process of the nanostructures is accomplished using a locally applied electric-field realised by using the MEMS structures as electrodes. The self-assembly and self-terminated contact process of nanostructures is achieved when the

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... nanostructure makes contact with the cold MEMS structure. This approach is flexible and both Silicon Nanowires (SiNWs) and Carbon Nanotubes (CNTs) have been successfully integrated to form Nanoelectromechanical Systems (NEMS) devices. These systems are potentially available for sensing applications with or without further functionalisation. As such, this approach mitigates integration and manufacturing difficulties which currently plague the fabrication of nanoscale devices.