A Phenomenological Analysis of MEMS-Based Sensor for Toxic Gas Sensing in Coal Mine

Santanu Maity, Abhishek Kumar
In coal mine different types of toxic gases are present. There is an increasing demand on toxic gas sensor for coal mine where the power consumption is a big issue. In this paper a simple structure of micro heater and inter digited electrode has been fabricated and micro machined structure for low power consumption is demonstrated. MEMS microheaters are designed and fabricated for entire two inch (2") process and 3mm X 3mm die sized microheaters obtained.