Empirical determination of the energy band gap narrowing in highly doped n+ silicon

Di Yan, Andres Cuevas
2013 Journal of Applied Physics  
Highly doped regions in silicon devices should be analyzed using Fermi-Dirac statistics, taking into account energy band gap narrowing (BGN). An empirical expression for the BGN as a function of dopant concentration is derived here by matching the modeled and measured thermal recombination current densities J 0 of a broad range of n þ dopant concentration profiles prepared by phosphorus diffusion. The analysis is repeated with Boltzmann statistics in order to determine a second empirical
more » ... ion for the apparent energy band gap narrowing, which is found to be in good agreement with previous work. V C 2013 AIP Publishing LLC.
doi:10.1063/1.4816694 fatcat:ia4l2th3izas3a6olzpnquja2m