Theoretical Study of Quasi-Longitudinal Lamb Modes in SiN/c-AlN Thin Composite Plates for Liquid Sensing Applications

Cinzia Caliendo, Ennio Giovine, Muhammad Hamidullah
2017 Proceedings (MDPI)  
The propagation of quasi-longitudinal Lamb mode along SiN/c-AlN thin composite plates was modeled and analyzed aimed at the design of a sensor able to detect the parameters change of a liquid environment, such as added mass and viscosity changes. Three modes were identified that have high phase velocity and quite good electroacoustic coupling efficiency: the fundamental quasi symmetric mode (qS0) and two higher order quasi-longitudinal modes (qL1 and qL2) with a dominantly longitudinal
more » ... ngitudinal displacement component at one plate side. The velocity and attenuation of these modes were calculated for different liquid viscosities, and the gravimetric and viscosity sensitivities of both the phase velocity and attenuation were theoretically calculated.
doi:10.3390/ecsa-4-04906 fatcat:3azx352zp5dbbjugxnmzt5nhzm