Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides

Candice Tsay, Yunlai Zha, Craig B. Arnold
2010 Optics Express  
Chalcogenide glass materials exhibit a variety of optical properties that make them desirable for near-and mid-infrared communications and sensing applications. However, processing limitations for these photorefractive materials have made the direct integration of waveguides with sources or detectors challenging. Here we demonstrate the viability of two complementary soft lithography methods for patterning and integrating chalcogenide glass waveguides from solution. One method, micro-molding in
more » ... capillaries (MIMIC), is shown to fabricate multi-mode As 2 S 3 waveguides which are directly integrated with quantum cascade lasers (QCLs). In a second method, we demonstrate the ability of micro-transfer molding (µTM), to produce arrays of single mode rib waveguides (2.5µm wide and 4.5µm high) over areas larger than 6 cm 2 while maintaining edge roughness below 5.1 nm. These methods form a suite of processes that can be applied to chalcogenide solutions to create a diverse array of mid-IR optical and photonic structures ranging from <5 to 10's of µm in dimension.
doi:10.1364/oe.18.026744 pmid:21165024 fatcat:yrswhfyztzfczk4ixsgvpa4ohe