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Fabrication and characterization of integrable GaAs-based high-contrast grating reflector and Fabry-Pérot filter array with GaInP sacrificial layer
[article]
2020
Integrable GaAs-based high-contrast gratings (HCGs) are fabricated and characterized, targeting applications in high-speed vertical-cavity surface-emitting lasers (VCSELs). A Ga 0.51 In 0.49 P sacrificial layer beneath the GaAs layer is employed to create a low index surrounding HCG strips by selective etching. Experimental results show that the finite-size HCG has a reflectivity of 93% from 1270 to 1330 nm for the transverse magnetic polarization, which is consistent with the calculated
doi:10.14279/depositonce-10096
fatcat:7iwcr22rxvccfmo7lomohusoie