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Investigation of Al-ZERODUR interface by Raman and secondary ion mass-spectroscopy
2008
Semiconductor Physics, Quantum Electronics & Optoelectronics
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The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed.
doi:10.15407/spqeo8.02.037
fatcat:sisvyhg77vbc7bx6amypfbdnc4