Investigation of Al-ZERODUR interface by Raman and secondary ion mass-spectroscopy

L. I. Berezhinsky, V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, prospect Nauky, 03028 Kyiv, Ukraine Phone: (38 044) 525-5778
2008 Semiconductor Physics, Quantum Electronics & Optoelectronics  
The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed.
doi:10.15407/spqeo8.02.037 fatcat:sisvyhg77vbc7bx6amypfbdnc4