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Tetrafluorosilane and phenyltrifluorosilane react with the O-trimethylsilyl derivatives of N.N-disubstituted aminoethanols and with the N-trimethylsilyl derivative of N.N.N′-trimethylethylene diamine to give the corresponding monosubstituted fluorosilyl compounds in which, on the basis of 19F NMR spectroscopic studies, intramolecular N -Si bonding raises the coordination number of silicon from four to five (i.e. λ4Si -> λ5Si). The low temperature 19F NMR data suggest a trigonal-bipyramidaldoi:10.1515/znb-1985-0223 fatcat:d3rryvt7o5cmvihqoxcxkrypce