Novel techniques for image process in electron probe microanalysis

N. Mori, H. Takahashi, M. Takakura, C. Nielsen
2002 Microscopy and Microanalysis  
Introduction For observing the element distribution in electron probe microanalysis, X -ray map of dots recorded on photo film has been used for a long time. Recently, with the development of computer technology, color map made by applying various image processing to digital data has appeared in order to emphasize important information, though raw data constituting a lot of information are important for observers. In this report, we will introduce an image processing to smooth the rough outline
more » ... by increasing pixel numbers without changing original number of pixels. Further, we will introduce a method of correcting the X -ray spread due to electron scattering in the sample by means of sharpness processing.
doi:10.1017/s1431927602108038 fatcat:bs6que7dl5gutksqhsoxaaaoku