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In order to clarify the visible-light responsive photocatalysis of TiO 2 co-doped with Cu and N atoms, plasma-nitridation was taken place to Cu-doped TiO 2 film. Cu-doped TiO 2 films were prepared by dip-coating method and they were nitrided by nitrogen plasma in the plasma-enhanced CVD system. Cu-doped TiO 2 films before and after plasma-nitridation show similar X-ray diffraction peaks of anatase TiO 2 . XPS analysis reveals that the ionic states of Ti and Cu in the Cu-doped TiO 2 films are Tidoi:10.4236/msce.2017.512005 fatcat:za7wpn5rpzhkjf2c5tmphw4oui