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An atomic-resolution microscope operating at a lower voltage is increasingly requested because the lower accelerating voltage provides less specimen damage and larger scattering cross-section that results in a high signal for analysis    . However, a resolution reduction by a diffraction limit becomes severe with an increase in the wavelength of an electron as an accelerating voltage decreases. Another resolution reduction is caused by a chromatic aberration due to an energy spread ofdoi:10.1017/s1431927614003626 fatcat:x7tzuja535ae3cj4zk5gqwbzqi