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D022-Mn2.6Ga thin films were fabricated by an ultra-high vacuum electron beam vapor deposition system on a MgO (100) single crystalline substrate with different buffer layer thicknesses (0.7 -5 nm). As the annealing temperature Ta increased to 400°C, the squareness of the M-H curves improved, and the saturation magnetization Ms and magnetic anisotropy Ku increased. At that time, from XRD patterns, D022-Mn3Ga (002) superlattice and (004) fundamental peaks were clearly observed from all samples.doi:10.20819/msjtmsj.18tr211 fatcat:tfdtmkt5n5e6zpfozk7mkyzioi